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首页> 外文期刊>Applied optics >Radiometry and metrology of a phase zone plate measured by extreme ultraviolet synchrotron radiation
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Radiometry and metrology of a phase zone plate measured by extreme ultraviolet synchrotron radiation

机译：极紫外同步加速器辐射测量相带板的辐射度和计量学

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摘要

The diffraction efficiency, focal length, and other radiometric and metrology properties of a phase zone plate were measured by using monochromatic synchrotron radiation in the 7-18.5 nm wavelength range. The zone plate was composed of molybdenum zones having a 4 mm outer diameter and 70 nm nominal thickness and supported on a 100 nm thick silicon nitride membrane. The diffraction efficiency was enhanced by the phase shift of the radiation passing through the zones. The measured first-order efficiency was in good agreement with the calculated efficiency. The properties of the zone plate, particularly the small variation of the efficiency with off-axis angle, make it suitable for use in a radiometer to accurately measure the absolutely calibrated extreme ultraviolet emission from the Sun.
机译：通过使用7-18.5 nm波长范围内的单色同步加速器辐射，测量了相带板的衍射效率，焦距以及其他辐射和计量学特性。区域板由外径为4 mm，标称厚度为70 nm的钼区域组成，并支撑在100 nm厚的氮化硅膜上。穿过区域的辐射的相移增强了衍射效率。测得的一阶效率与计算出的效率非常吻合。区域板的特性，特别是效率随偏轴角的微小变化，使其适合用于辐射计中，以精确地测量来自太阳的绝对校准的极端紫外线发射。

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