• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied optics >Interferometric technique for faceted microstructure metrology using an index matching liquid
【24h】

Interferometric technique for faceted microstructure metrology using an index matching liquid

机译：使用折射率匹配液的刻面微结构计量学干涉技术

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Microstructured optical products are becoming more widespread due to advances in manufacturing. Many of these structures contain faceted surfaces with steep slopes. Adequate metrology for such surfaces is lacking. We describe an interferometric technique that combines plane wave illumination with an index matching liquid to achieve high quality, high speed measurements of such faceted microstructures. We account for refraction at the interfaces, rather than consider only optical path length changes due to the index liquid, and this significantly improves the facet angle measurement. We demonstrate the technique with the measurement of an array of micropyramids and show that our results are in good agreement with measurements taken on a contact profilometer. We also extend the technique to measure opaque microcorner cubes by implementing an intermediate replication step.
机译：由于制造的进步，微结构化光学产品正变得越来越普遍。这些结构中许多都包含带有陡峭坡度的刻面。对于这种表面缺乏足够的计量。我们描述了一种将平面波照明与折射率匹配液体相结合以实现此类多面微结构的高质量，高速测量的干涉技术。我们考虑了界面处的折射，而不是仅考虑折射率液体引起的光程长度变化，这大大改善了刻面角度测量。我们通过微金字塔阵列的测量演示了该技术，并表明我们的结果与接触轮廓仪上的测量结果非常吻合。我们还通过实施中间复制步骤将技术扩展为测量不透明的微角立方体。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号