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Thickness measurement system for transparent plates using dual digital versatile disc (DVD) pickups

机译：使用双数字多功能光盘（DVD）拾音器的透明板厚度测量系统

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摘要

A low-cost high-precision thickness measurement system for transparent plates that uses dual digital versatile disc (DVD) pickups is proposed. The two DVD pickups are used as the transmitter and the receiver in the measurement system, respectively. One of the DVD pickups emits a laser to the other DVD pickup (receiver) and projects on the photodiode integrated circuit of the receiver. The transparent plate is placed in the optical path to change the focused point that will affect the focusing error signal (FES) of the receiver. Using the FES, a mathematical model for thickness measurement based on the geometric optical method is developed. The experimental results show that the accuracy is 1.5 (mu)m, and the uncertainty is estimated to be +-1.37 (mu)m for the measured thickness of 150(mu)m.
机译：提出了一种低成本的用于透明板的高精度厚度测量系统，该系统使用双数字多功能光盘（DVD）拾音器。两个DVD拾音器分别用作测量系统中的发送器和接收器。其中一个DVD拾取器向另一个DVD拾取器（接收器）发射激光，并投射到接收器的光电二极管集成电路上。将透明板放置在光路中以更改聚焦点，该聚焦点将影响接收器的聚焦误差信号（FES）。使用FES，开发了基于几何光学方法的厚度测量数学模型。实验结果表明，精度为1.5μm，对于150μm的测量厚度，不确定度估计为+ -1.37μm。

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