Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

Shinn-Fwu Wang; Ming-Hung Chiu; Wei-Wu Chen; Fu-Hsi Kao; Rong-Seng Chang

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Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

机译：外差干涉法中基于多次全内反射的小位移传感系统

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A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0.417 nm. The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated.

机译：提出了一种基于外差干涉法中多次全内反射的小位移传感系统。在本文中，只有通过测量s偏振态和p偏振态之间的相位差的变化来获得全内反射效果，才能获得较小的位移。为了提高灵敏度，我们使用平行四边形棱镜增加了内部反射的总数。该方法的理论分辨率优于0.417 nm。该方法具有一些优点，例如，高分辨率，高灵敏度和实时测量。而且，证明了其可行性。

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《Applied optics》 |2009年第13期|共8页
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Shinn-Fwu Wang; Ming-Hung Chiu; Wei-Wu Chen; Fu-Hsi Kao; Rong-Seng Chang;
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1. Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry [J] . Shinn-Fwu Wang, Ming-Hung Chiu, Wei-Wu Chen, Applied optics . 2009,第13期

机译：外差干涉法中基于多次全内反射的小位移传感系统
2. U-shaped optical fiber sensor based on multiple total internal reflections in heterodyne interferometry [J] . Shinn-Fwu Wang Optics and Lasers in Engineering . 2009,第10期

机译：外差干涉法中基于多次全内反射的U形光纤传感器
3. Instrument for measuring small angles by use of multiple total internal reflections in heterodyne interferometry [J] . Chiu MH, Wang SF, Chang RS Applied Optics . 2004,第29期

机译：外差式干涉仪中利用多次全内反射测量小角度的仪器
4. New Type Small-Angle Sensor Based on Multiple Total Internal Reflections and Attenuated Total Reflections in Heterodyne Interferometry [C] . Shinn-Fwu Wang, Hung-Shing Tsai, Yuan-Fong Chau, International Conference on Engineering and Technologynnovation . 2013

机译：基于多个全内部反射的新型小角度传感器，并在外差干涉测量中衰减全反射
5. The development of electroactive total internal reflection integrated optical waveguide and total internal reflection fluorescence devices for the characterization of metalloprotein films. [D] . Robertson, Rebecca Tinsley. 2002

机译：电活性全内反射集成光波导和全内反射荧光器件的开发，用于表征金属蛋白膜。
6. A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry [O] . Shinn-Fwu Wang 2009

机译：利用全内反射理论和表面等离子体共振技术进行外差式干涉的小位移传感器
7. A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry [O] . Shinn-Fwu Wang 2009

机译：利用全内反射理论和表面等离子体共振技术进行外差式干涉的小位移传感器
8. Instrumentation for Multiplex Spectroscopic Sensing. Appendix A: spectroscopic Diagnosis of Chemical Processes: Applications of Optical Parametric Oscillators. Appendix B: Optical Heterodyne Signal Generation and Detection in Cavity Ringdown Spectroscopy based on a Rapidly Swept Cavity [R] . Orr, B. J. 2001

机译：多重光谱传感仪器。附录a：化学过程的光谱诊断：光学参量振荡器的应用。附录B：基于快速扫描腔的腔体衰荡光谱中的光学外差信号生成和检测

Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

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