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Iterative least square phase-measuring-method that tolerates extended finite bandwidth illumination

机译：迭代最小二乘相位测量方法，可承受扩展的有限带宽照明

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摘要

Iterative least square phase-measuring techniques address the phase-shifting interferometry issue of sensitivity to vibrations and scanner nonlinearity. In these techniques the wavefront phase and phase steps are determined simultaneously from a single set of phase-shifted fringe frames where the phase shift does not need to have a nominal value or be a priori precisely known. This method is commonly used in laser interferometers in which the contrast of fringes is constant between frames and across the field. We present step-by-step modifications to the basic iterative least square method. These modifications allow for vibration insensitive measurements in an interferometric system in which fringe contrast varies across a single frame, as well as from frame to frame, due to the limited bandwidth light source and the nonzero numerical aperture of the objective. We demonstrate the efficiency of the new algorithm with experimental data, and we analyze theoretically the degree of contrast variation that this new algorithm can tolerate.
机译：迭代最小二乘相位测量技术解决了对振动和扫描仪非线性敏感的相移干涉测量问题。在这些技术中，波前相位和相位步长是从一组相移条纹帧同时确定的，其中相移不需要具有标称值或无需先验精确地知道。这种方法通常用于激光干涉仪中，其中条纹的对比度在帧之间和整个视场中都是恒定的。我们提出了对基本迭代最小二乘法的逐步修改。这些修改允许在干涉系统中进行振动不敏感的测量，在该系统中，由于带宽光源的有限和物镜的数值孔径非零，所以条纹对比度在单个帧之间以及帧与帧之间都会发生变化。我们用实验数据证明了该新算法的有效性，并从理论上分析了该新算法可以容忍的对比度变化程度。

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