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Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor

机译：彩色共焦传感器测量平面平行板和透镜厚度的方法分析

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摘要

Noncontact optical metrology based on the chromatic confocal principle is becoming increasingly important for fast and accurate measurements of surface topography, distance, and layer thickness in engineering and industry. These sensors are based on the wavelength dependence of longitudinal chromatic aberration of optical systems, and the distance or thickness of the measured sample is coded into spectral information. We provide a theoretical analysis of a problem of the thickness measurement of transparent samples (glass plane-parallel plates or lenses) with respect to material dispersion. Our work deals with a description and analysis of induced measurement errors in the cases of measurement of the thickness of a plane-parallel plate and the central thickness of a lens. Relations are derived for a quantitative evaluation of these errors and a method is presented for minimizing the influence of these errors on the accuracy of measurement.
机译：在工程和工业中，基于色共焦原理的非接触式光学计量对于快速准确地测量表面形貌，距离和层厚度变得越来越重要。这些传感器基于光学系统纵向色差的波长依赖性，并且将被测样品的距离或厚度编码为光谱信息。我们提供了透明样品（玻璃平行平板或透镜）相对于材料分散的厚度测量问题的理论分析。我们的工作是描述和分析在测量平行平板的厚度和透镜的中心厚度时引起的测量误差。得出了用于对这些误差进行定量评估的关系，并提出了一种使这些误差对测量精度的影响最小的方法。

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