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Optical inspection of liquid crystal variable retarder inhomogeneities

机译:液晶可变延迟器不均匀性的光学检查

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Liquid crystal variable retarders (LCVRs) are starting to be widely used in optical systems because of their capacity to provide a controlled variable optical retardance between two orthogonal components of incident polarized light or to introduce a known phase shifting (PS) between coherent waves, both by means of an applied voltage. Typically, the retardance or PS introduced by an LCVR is not homogeneous across the aperture. On the one hand, the LCVR glass substrates present a global bend that causes an overall variation of the retardance or PS. On the other hand, in the manufacturing process of an LCVR, there sometimes appears a set of micro-air bubbles that causes local retardance or PS inhomogeneities. In this work, we present an interferometric technique based on a Mach-Zehnder interferometer that is insensitive to vibrations and capable of inspecting and characterizing the LCVR's retardance or PS inhomogeneities. The feasibility of the proposed method is demonstrated in the experimental results, where the LCVR retardance is measured with an error of about 0.2rad. The thickness of possible micro-air bubbles is obtained with a resolution of about 50 nm.
机译:由于液晶可变延迟器(LCVR)具有在入射偏振光的两个正交分量之间提供可控可变光学延迟或在相干波之间引入已知相移(PS)的能力,因此已开始在光学系统中广泛使用。通过施加电压。通常,由LCVR引入的延迟或PS在整个孔径上都不均匀。一方面,LCVR玻璃基板呈现整体弯曲,从而导致延迟或PS的整体变化。另一方面,在LCVR的制造过程中,有时会出现一组导致局部延迟或PS不均匀性的微气泡。在这项工作中,我们提出了一种基于Mach-Zehnder干涉仪的干涉技术,该技术对振动不敏感并且能够检查和表征LCVR的延迟或PS不均匀性。实验结果证明了所提出方法的可行性,其中LCVR延迟的测量误差约为0.2rad。以约50nm的分辨率获得可能的微气泡的厚度。

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