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Basic angles in microelectromechanical system scanning grating spectrometers

机译:微机电系统扫描光栅光谱仪的基本角度

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Modern miniaturized scanning grating spectrometers (SGSs) are often based on microelectromechanical system devices. In contrast to classical spectrometers, such systems exhibit additional design constraints, like a symmetrical motion of the grating with a limited deflection. A detailed mathematical analysis of typical SGS configurations based on the grating equation considering these constraints is presented. Equations that relate the basic angles on a scanning grating to the grating properties and the attainable wavelength range of a spectrometer are derived, and the solution set is examined. Furthermore, the analytical description can be used to optimize SGSs with symmetrically moving gratings. The attainable spectral range for a given deflection amplitude of the grating can be calculated. Alternatively, the required grating properties can be determined for a given spectral range.
机译:现代的微型扫描光栅光谱仪(SGS)通常基于微机电系统设备。与经典的光谱仪相比,此类系统表现出额外的设计约束,例如具有有限偏转的光栅对称运动。提出了基于考虑这些约束的光栅方程的典型SGS配置的详细数学分析。推导了将扫描光栅上的基本角与光栅特性和光谱仪可达到的波长范围相关联的方程式,并研究了解集。此外,分析描述可用于优化具有对称移动光栅的SGS。对于给定的光栅偏转幅度,可以计算出可达到的光谱范围。或者,可以在给定的光谱范围内确定所需的光栅属性。

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