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Generalized method for calculating astigmatism of the unit-magnification multipass system

机译:单位放大倍数系统像散的通用计算方法

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摘要

A generalized method to accurately calculate astigmatism of the unit-magnification multipass system (UMS) is proposed. A practical coaxial optical transmission model is developed for the UMS. Astigmatism analysis is then made convenient by a 4 by 4 general transfer matrix. Astigmatism correction is significantly promoted, and hence further improvement in imaging quality can be expected. Good agreement between numerical simulations and Zemax ray tracing results verifies the effectiveness of this method. The resulted RMS spot size of this method is only 25percent to 64percent of other previous methods based on the golden section search for minimum astigmatism in real design cases. This method is helpful for the optical design of the UMS.
机译:提出了一种精确计算单位放大倍数系统(UMS)像散的通用方法。为UMS开发了实用的同轴光传输模型。然后通过4×4通用传输矩阵使像散分析变得方便。显着促进了像散校正,因此可以期待成像质量的进一步改善。数值模拟与Zemax射线追踪结果之间的良好一致性验证了该方法的有效性。基于黄金分割搜索以在实际设计案例中获得最小散光,此方法所得到的RMS点大小仅为其他先前方法的25%至64%。此方法有助于UMS的光学设计。

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