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Phase-locked loop based on machine surface topography measurement using lensed fibers

机译：基于使用透镜光纤的机器表面形貌测量的锁相环

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摘要

We present the phase-locked loop (PLL)-based metrology concept using lensed fibers for on-machine surface topography measurement. The shape of a single-mode fiber at the endface was designed using an ABCD matrix method, and two designed lensed fibers--the ball type and the tapered type--were fabricated, and the performance was evaluated, respectively. As a result, the interferometric fringe was not found in the case of the ball lensed fiber, but the machined surface could be measured by utilization of autofocusing and intensity methods. On the other hand, a very clear Fizeau interferometric fringe was observed in the case of the tapered lensed fiber. Its performance was compared with the results of the capacitance sensor and a commercially available white-light interferometer. We confirmed that PLL-based surface profile measurement using the tapered and ball lensed fibers can be applied for on-machine surface topography measurement applications.
机译：我们介绍了基于锁相环（PLL）的计量概念，该技术使用透镜光纤进行机上表面形貌测量。使用ABCD矩阵方法设计了端面的单模光纤的形状，并制造了两种设计的透镜光纤（球形和锥形），并分别进行了性能评估。结果，在球透镜光纤的情况下没有发现干涉条纹，但是可以通过利用自动聚焦和强度方法来测量加工表面。另一方面，在锥形透镜光纤的情况下，观察到非常清晰的Fizeau干涉条纹。将其性能与电容传感器和市售白光干涉仪的结果进行了比较。我们确认，使用锥形和球形透镜纤维进行的基于PLL的表面轮廓测量可以应用于机上表面形貌测量应用。

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