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Spectroscopic ellipsometer based on direct measurement of polarization ellipticity

机译：基于直接测量偏振椭圆率的光谱椭圆仪

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A polarizer-sample-Wollaston prism analyzer ellipsometer is described in which the ellipsometric angles psi and DELTA are determined by direct measurement of the elliptically polarized light reflected from the sample. With the Wollaston prism initially set to transmit p- and s-polarized light, the azimuthal angle P of the polarizer is adjusted until the two beams have equal intensity. This condition yields psi velence +-P and ensures that the reflected elliptically polarized light has an azimuthal angle of +-45 deg and maximum ellipticity. Rotating the Wollaston prism through 45 deg and adjusting the analyzer azimuth until the two beams again have equal intensity yields the ellipticity that allows DELTA to be determined via a simple linear relationship. The errors produced by nonideal components are analyzed. We show that the polarizer dominates these errors but that for most practical purposes, the error in psi is negligible and the error in DELTA may be corrected exactly. A native oxide layer on a silicon substrate was measured at a single wavelength and multiple angles of incidence and spectroscopically at a single angle of incidence. The best fit film thicknesses obtained were in excellent agreement with those determined using a traditional null ellipsometer.
机译：描述了一种偏振器-样品-Wollaston棱镜分析仪椭圆仪，其中，通过直接测量从样品反射的椭圆偏振光来确定椭圆角psi和DELTA。在最初将沃拉斯顿棱镜设置为透射p和s偏振光的情况下，调整偏振器的方位角P直到两个光束具有相同的强度。这种情况产生的psi​​速度为+ -P，并确保反射的椭圆偏振光具有+ -45度的方位角和最大椭圆率。将沃拉斯顿棱镜旋转45度，并调整分析仪方位角，直到两个光束再次具有相同的强度，产生的椭圆率可通过简单的线性关系确定DELTA。分析了非理想组件产生的误差。我们显示了偏振器是这些误差的主要因素，但是对于大多数实际目的而言，psi的误差可以忽略不计，而DELTA的误差可以精确地校正。在单个波长和多个入射角下以光谱法在单个入射角下测量了硅衬底上的自然氧化层。所获得的最佳贴合膜厚度与使用传统的空偏椭圆仪确定的膜厚度极好一致。

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