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Compact sensor for measuring two-dimensional tilt using a two-dimensional transmission grating and the Talbot effect

机译：紧凑型传感器，用于使用二维透射光栅和Talbot效应测量二维倾斜

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摘要

This paper proposes a tilt sensor that measures the small two-dimensional tilt of a plane reflective object using the Talbot effect. It is an extension of a previously proposed one-dimensional tilt sensor. The light beam reflected from the object impinges on a hexagonal grating, and the intensity of the diffracted wave is detected on an image sensor located at a Talbot distance from the grating. The diffraction intensity displaces due to the tilt of the object. The displacement is calculated by the Fourier transform method to obtain the two-dimensional tilt. This sensor is very simple and compact. The principle of the sensor is explained for a grating with a general pattern. An experiment using a hexagonal grating shows its validity. Discussions are given for making it more practical.
机译：本文提出了一种倾斜传感器，该传感器使用Talbot效应测量平面反射物体的二维小倾角。它是先前提出的一维倾斜传感器的扩展。从物体反射的光束入射到六边形光栅上，并且在距光栅Talbot距离的图像传感器上检测到衍射波的强度。衍射强度由于物体的倾斜而移位。通过傅立叶变换法计算位移以获得二维倾斜。该传感器非常简单和紧凑。针对具有一般图案的光栅解释了传感器的原理。使用六边形光栅的实验表明了其有效性。讨论使其更实用。

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