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Multitude of glass surface roughness morphologies as a tool box for dosed optical scattering

机译:大量的玻璃表面粗糙度形态作为用于剂量光学散射的工具箱

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摘要

Glass surface roughness can be considered positive for certain applications in optics. Results of maskless (i.e., lithography-free) reactive-ion-etch runs are given, where (depending on etch parameters) self-masking leads to very different surface morphologies. The latter's variety allows for virtually any desired scattered visible light power portion, a result that we term dosed scattering. The surfaces are characterized, for example, by the root-mean-square roughness (delta)_(rms), while their optical scattering is described by the diffuse transmission as well as the Harvey parameters. Since the wavelengths lambda in glass are around (delta)_(rms), the shapes of the individual scatterers account for local refraction adding up to the usual scattering.
机译:对于光学中的某些应用,可以认为玻璃表面粗糙度是正值。给出了无掩膜(即无光刻)反应离子蚀刻的结果,其中(取决于蚀刻参数)自掩膜导致非常不同的表面形态。后者的多样性实际上允许任何所需的散射可见光功率部分,我们称其为定量散射。表面的特征在于例如均方根粗糙度δ_(rms),而它们的光学散射由漫射透射率和Harvey参数来描述。由于玻璃中的波长λ约为δ_(rms),因此各个散射体的形状会引起局部折射,从而导致通常的散射。

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