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Characterization of zone plate properties using monochromatic synchrotron radiation in the 2 to 20 nm wavelength range

机译：使用单色同步加速器辐射在2至20 nm波长范围内表征波带片特性

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摘要

A zone plate composed of Mo zones having 4 mm outermost zone diameter, 100 nm outermost zone width, and supported on a silicon nitride membrane was characterized using monochromatic synchrotron radiation in the 2 to 20nm wavelength range. The zero and first order efficiencies were measured and compared to ab initio calculations that account for the optical properties of the materials, the width and shape of the zones, and multiple-layer thin-film effects. It is shown that the thicknesses of the Mo zones and the membrane and the ratio of the zone width to zone period can be independently determined from the measured diffraction efficiencies in the zero and first orders and that the computational code can be used to reliably design zone plates that are optimized for applications such as solar irradiance monitors in the extreme ultraviolet region.
机译：使用在2到20nm波长范围内的单色同步加速器辐射来表征由最外层直径为4mm，最外层宽度为100nm且被支撑在氮化硅膜上的Mo区组成的区板。测量了零效率和一阶效率，并将其与从头算的计算结果进行了比较，这些计算考虑了材料的光学特性，区域的宽度和形状以及多层薄膜效应。结果表明，Mo区域和膜的厚度以及区域宽度与区域周期的比率可以根据测得的零级和一级衍射效率独立确定，并且计算代码可用于可靠地设计区域专门针对极端紫外线区域中的太阳辐射监测器等应用进行了优化的印版。

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