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Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout

机译：基于二波长读数的基于光栅干涉仪的二维传感器阵列的灵敏度增强

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摘要

Diffraction gratings integrated with microelectromechanical systems (MEMS) sensors offer displacement measurements with subnanometer sensitivity. However, the sensitivity of the interferometric readout may drop significantly based on the gap between the grating and the reference surface. A two-wavelength (2 - lambda) readout method was previously tested using a single MEMS sensor for illustrating increased displacement measurement capability. This work demonstrates sensitivity enhancement on a sensor array with large scale parallelization (approx20,000 sensors). The statistical representation, which is developed to model sensitivity enhancement within a grating based sensor array, is supported by experimental results using a thermal sensor array. In the experiments, two lasers at different wavelengths (633 and 650 nm) illuminate the thermal sensor array from the backside, time-sequentially. The diffracted first order light from the array is imaged onto a single CCD camera. The target scene is reconstructed by observing the change in the first diffracted order diffraction intensity for both wavelengths. Merging of the data from two measurements with two lasers was performed by taking the larger of the two CCD measurements with respect to the reference image for each sensor. approx30percent increase in the average sensitivity was demonstrated for a 160 X 120 pixel IR sensor array. Proposed architecture is also applicable to a variety of sensing applications, such as parallel biosensing and atomic force microscopy, for improved displacement measurements and enhanced sensitivity.
机译：集成有微机电系统（MEMS）传感器的衍射光栅可提供亚纳米灵敏度的位移测量。但是，基于光栅和参考表面之间的间隙，干涉式读数的灵敏度可能会大大下降。以前使用单个MEMS传感器测试了两波长（2-λ）读出方法，以说明增加的位移测量能力。这项工作演示了大规模并行化的传感器阵列（约20,000个传感器）上的灵敏度提高。使用热传感器阵列的实验结果支持了统计表示，该统计表示被开发用于对基于光栅的传感器阵列内的灵敏度增强进行建模。在实验中，两个不同波长（633和650 nm）的激光器从背面按时间顺序照射热传感器阵列。来自阵列的衍射一阶光被成像到单个CCD相机上。通过观察两个波长的第一衍射级衍射强度的变化来重建目标场景。通过对每个传感器的参考图像进行两次CCD测量中较大的一个来合并两个激光器的两次测量中的数据。对于160 X 120像素的红外传感器阵列，平均灵敏度提高了约30％。提议的体系结构还适用于多种传感应用，例如并行生物传感和原子力显微镜，以改善位移测量和增强灵敏度。

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