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Development and characterization of piezoelectrically actuated corner cube retroreflectors for applications in free-space optical sensor network

机译:压电致动角锥后向反射器的开发和表征,用于自由空间光学传感器网络

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摘要

In this paper, we report the development of an optical sensor network (OSN) based on piezoelectrically actuated corner cube retroreflectors (PA-CCRs). PA-CCRs were fabricated by microelectromechanical systems processes and assembled by aligning horizontally actuated mirrors and vertical side walls in a holder, which allows mass production. Fabricated PA-CCRs showed a tilting angle by more than 1.5 deg at 5 V bias voltage. A 3 dB cutoff frequency was measured to be in the range of 3.5 kHz. To show the feasilbility, an OSN was established based on fabricated PA-CCRs for on-off keying passive transmission links. The results demonstrated data transmission at a rate up to 5 kb/s.
机译:在本文中,我们报告了基于压电驱动的角锥后向反射器(PA-CCR)的光学传感器网络(OSN)的发展。 PA-CCR通过微机电系统工艺制造,并通过在支架中对齐水平致动镜和垂直侧壁进行组装,从而实现了批量生产。制成的PA-CCR在5 V偏置电压下的倾斜角超过1.5度。测量的3 dB截止频率在3.5 kHz范围内。为了展示其可行性,基于制造的PA-CCR建立了OSN,用于开关键控无源传输链路。结果表明,数据传输速率高达5 kb / s。

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