Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement

Bofan Wang; Xiangzhao Wang; Osami Sasaki; Zhongliang Li

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Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement

机译：对位移测量的激光二极管的强度调制不敏感的正弦相位调制干涉仪

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In sinusoidal phase-modulating laser diode interferometers, an injection current of a laser diode is sinusoidally modulated to scan the laser wavelength. However, the modulation of the injection current also involves an intensity modulation of the light, which increases the measurement error if a conventional signal processing is used. A novel signal processing for displacement measurement is proposed to eliminate the influence of the intensity modulation. Numerical simulation results and experimental results make it clear that an optimal depth of the sinusoidal phase modulation exists that can reduce the measurement error to a few nanometers.

机译：在正弦相位调制激光二极管干涉仪中，正弦调制激光二极管的注入电流以扫描激光波长。然而，注入电流的调制还涉及光的强度调制，如果使用常规信号处理，则这会增加测量误差。为了消除强度调制的影响，提出了一种新颖的位移测量信号处理方法。数值模拟结果和实验结果清楚地表明，存在最佳的正弦相位调制深度，可以将测量误差减小到几纳米。

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《Applied optics》 |2012年第12期|共6页
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Bofan Wang; Xiangzhao Wang; Osami Sasaki; Zhongliang Li;
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1. Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement [J] . Bofan Wang, Xiangzhao Wang, Osami Sasaki, Applied optics . 2012,第12期

机译：对位移测量的激光二极管的强度调制不敏感的正弦相位调制干涉仪
2. Siusoidal phase-modulating laser diode interferometer insensitive to intensity modulation for real-time displacement measurement with feedback control system [J] . Bofan Wang, Xiangzhao Wang, Zhongliang Li, Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2012,第18期

机译：对强度调制不敏感的正弦相位调制激光二极管干涉仪，用于带反馈控制系统的实时位移测量
3. Sinusoidal phase-modulating laser diode interferometer insensitive to the intensity modulation of the light source [J] . Zhongliang Li, Xiangzhao Wang, Peng Bu, Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2009,第16期

机译：对光源强度调制不敏感的正弦调相激光二极管干涉仪
4. All fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source [C] . Xuefeng Wang, Xiangzhao Wang, Caini Zhang, International Symposium on Optoelectronics and Microelectronics . 2001

机译：所有光纤正弦相位调制激光二极管干涉仪对光源的强度变化不敏感
5. Development of a low cost laser diode modulation circuit for direct and 2f spectroscopic measurements of water. [D] . Torabzadeh, Sahar. 2008

机译：开发用于直接和2f光谱测量水的低成本激光二极管调制电路。
6. The Influence of Diode Laser Intensity Modulation on Photoacoustic Image Quality for Oral Soft Tissue Imaging [O] . Rini Widyaningrum, Mitrayana Mitrayana, Rellyca Sola Gracea, 2020

机译：二极管激光强度调制对口腔软组织成像的光声图像质量的影响
7. Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement [O] . Wang BF (Wang Bofan), Wang XZ (Wang Xiangzhao), Sasaki O (Sasaki Osami), 2012

机译：对位移测量的激光二极管的强度调制不敏感的正弦相位调制干涉仪
8. Sinusoidal and Digital High-Speed Modulation of p-Type Substrate Mass-Transported Diode Lasers [R] . Tsang, D. Z., Liau, Z. L. 1987

机译：p型衬底质量传输二极管激光器的正弦和数字高速调制

Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement

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