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Detection techniques in low-coherence interferometry and their impact on overall measurement accuracy

机译:低相干干涉测量中的检测技术及其对整体测量精度的影响

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摘要

This paper deals with interference fringe center detection techniques used in low-coherence interferometry for contactless 3D inspection of macroscopic objects. It presents a complex analysis of several frequently used detection techniques and shows their impact on the measurement accuracy. The analysis compares those techniques in terms of computational complexity, measurement accuracy, and resistance to optical dispersion caused by wedge-shaped optical components. (C) 2014 Optical Society of America
机译:本文涉及低相干干涉测量中用于宏观物体非接触式3D检查的干涉条纹中心检测技术。它对几种常用的检测技术进行了复​​杂的分析,并显示了它们对测量精度的影响。分析在计算复杂度,测量精度和由楔形光学组件引起的光学色散抵抗方面对这些技术进行了比较。 (C)2014年美国眼镜学会

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