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首页> 外文期刊>Applied optics >Liquid-crystal phase-shifting lateral shearing interferometer with improved fringe contrast for 3D surface profilometry
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Liquid-crystal phase-shifting lateral shearing interferometer with improved fringe contrast for 3D surface profilometry

机译：具有改善的条纹对比度的液晶相移横向剪切干涉仪，用于3D表面轮廓测量

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摘要

We report the development of a common-path and nonmechanical scanning phase-shifting lateral shearing interferometer based on a homogeneous gap and wedge-shaped gap liquid-crystal (LC) cell. The modified cell consists of semi-reflecting and fully reflecting glass plates with LC material sandwiched between them so that the amount of reflected light from both the surfaces is nearly equal, thus generating high contrast interference fringes. The thickness of the LC cell was maintained at ～3 μm uniformly for a homogeneous gap and a varying wedge gap was also introduced between two glass plates. Phase-shifting linear fringe patterns of high contrast were generated. The phase-shifted interferograms were projected onto an object and the distorted interferograms were recorded by a CCD camera. The phase-shifting fringe analysis technique was used to reconstruct the 3D shape of the object. The present system is compact and low cost.
机译：我们报告了基于均匀间隙和楔形间隙液晶（LC）单元的共径和非机械扫描相移横向剪切干涉仪的发展。修改后的单元由半反射和全反射玻璃板组成，中间夹有LC材料，因此两个表面的反射光量几乎相等，从而产生高对比度的干涉条纹。 LC单元的厚度均匀地保持在〜3μm，具有均匀的间隙，并且在两个玻璃板之间也引入了变化的楔形间隙。产生了高对比度的相移线性条纹图案。将相移的干涉图投影到物体上，并通过CCD摄像机记录变形的干涉图。相移条纹分析技术用于重建对象的3D形状。本系统紧凑且成本低。

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