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Laser damage resistance of ion-beam sputtered Sc_2O_3/SiO_2 mixture optical coatings

机译:离子束溅射Sc_2O_3 / SiO_2混合光学涂层的抗激光损伤

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摘要

We report on the correlation between the laser damage resistance, the optical and the physical properties of Sc_2O_3/SiO_2 mixture coatings. Several sets of samples with ten different mixture ratios have been prepared by ion-beam sputtering. The atomic compositions of the mixture thin films are quantified employing x-ray photoelectron spectroscopy depth profiles. Laser-induced damage thresholds are determined with single subpicosecond pulses (500 fs) at 1030 nm. Furthermore, Son1 multishot measurements are realized in the ultraviolet wavelength range (355 nm) at pulse durations of 5 ns. In addition, the influence of two different substrate polishing qualities on the radiation resistance of the composite thin films is discussed.
机译:我们报告了抗激光损伤,Sc_2O_3 / SiO_2混合涂层的光学性能和物理性能之间的相关性。通过离子束溅射已经制备了具有十种不同混合比的几组样品。使用X射线光电子能谱深度分布图来量化混合物薄膜的原子组成。激光诱发的损伤阈值由1030 nm处的单个皮秒脉冲(500 fs)确定。此外,Son1多次测量是在5 ns的脉冲持续时间的紫外波长范围(355 nm)中实现的。此外,讨论了两种不同的基板抛光质量对复合薄膜抗辐射性的影响。

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