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Analysis of diffraction wavefront in visible-light point-diffraction interferometer

机译:可见光点衍射干涉仪中衍射波前的分析

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As a key element in point-diffraction interferometer (PDI), the diffraction pinhole determines the sphericity of the reference wavefront and achievable precision of the testing system. The point-diffraction wavefront error, aperture angle, and light transmittance in the PDI operating at visible light, which are determined by pinhole dimension, are analyzed based on finite difference time domain (FDTD) method. The study shows that an aperture angle about 75° can be obtained with a 1 μm pinhole diameter, and the corresponding testing precision is better than root mean square λ/1000 within 0.35 NA. Both the numerical simulation and experiments have been carried out to demonstrate the feasibility of the proposed analysis approach, and a good agreement is obtained between calculated and measured parameters in visible-light PDI. The proposed simulation approach with the FDTD method provides a feasible way to analyze the diffraction wavefront in visible-light PDI, as well as a powerful tool for the design and optimization of PDI system.
机译:作为点衍射干涉仪(PDI)的关键元素,衍射针孔决定了参考波前的球形度以及测试系统可达到的精度。基于时域有限差分法(FDTD)分析了针孔尺寸确定的PDI在可见光下的点衍射波阵面误差,孔径角和透光率。研究表明,针孔直径为1μm时可获得约75°的孔径角,并且在0.35 NA内,相应的测试精度优于均方根λ/ 1000。数值模拟和实验均进行了验证,证明了所提出分析方法的可行性,并且在可见光PDI中计算参数与测量参数之间取得了良好的一致性。提出的FDTD仿真方法为分析可见光PDI中的衍射波前提供了一种可行的方法,也是设计和优化PDI系统的有力工具。

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