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首页> 外文期刊>Applied optics >Observation of the waveguide resonance in a periodically patterned high refractive index broadband antireflection coating
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Observation of the waveguide resonance in a periodically patterned high refractive index broadband antireflection coating

机译：在周期性图案化的高折射率宽带减反射涂层中观察波导共振

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摘要

Grating waveguide structures have been prepared by the deposition of a high refractive index broadband antireflection coating onto a patterned fused silica substrate. Aluminum oxide and hafnium oxide as well as mixtures thereof have been used as coating materials. Optical reflection measurements combined with atomic force microscopy have been used to characterize the structures. Upon illumination with a TE wave, the best structure shows a narrow reflection peak located at 633 nm at an incidence angle of about 17°. The peak reflectance of that sample accounts for more than 89%. Off-resonance interference structures appear strongly suppressed in the spectrum between 450 and 800 nm because of the characteristics of the designed antireflection layer. The structure thus possesses a notch filter spectral characteristic in a broad spectral range.
机译：光栅波导结构是通过将高折射率宽带抗反射涂层沉积到图案化的熔融石英基底上而制备的。氧化铝和氧化ha及其混合物已被用作涂料。将光学反射测量与原子力显微镜相结合已用于表征结构。在用TE波照射时，最佳结构显示出在约17°的入射角处位于633nm处的窄反射峰。该样品的峰值反射率超过89％。由于设计的抗反射层的特性，在450至800 nm之间的光谱中，非共振干涉结构似乎受到了强烈抑制。因此，该结构在较宽的光谱范围内具有陷波滤波器的光谱特性。

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