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Universal dispersion model for characterization of optical thin films over a wide spectral range: application to hafnia

机译：用于在宽光谱范围内表征光学薄膜的通用色散模型：在氧化f中的应用

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摘要

A dispersion model capable of expressing the dielectric response of a broad class of optical materials in a wide spectral range from far IR to vacuum UV is described in detail. The application of this universal dispersion model to a specific material is demonstrated using the ellipsometric and spectrophotometric characterization of a hafnia film prepared by vacuum evaporation on silicon substrate. The characterization utilizes simultaneous processing of data from multiple techniques and instruments covering the wide spectral range and includes the characterization of roughness, nonuniformity, transition layer, and native oxide layer on the back of the substrate. It is shown how the combination of measurements in light reflected from both sides of the sample and transmitted light allows the separation of weak absorption in films and substrates. This approach is particularly useful in the IR region where the absorption structures in films and substrates often overlap and a prior measurement of the bare substrate may be otherwise necessary for precise separation. Individual phenomena that contribute to the dielectric response, i.e., interband electronic transitions, electronic excitations involving the localized states, and phonon absorption, are discussed in detail. A quantitative analysis of absorption on localized states, permitting the separation of transitions between localized states from transitions between localized and extended states, is utilized to obtain estimates of the density of localized states and film stoichiometry. (C) 2015 Optical Society of America
机译：详细描述了一种能够在从远红外到真空紫外的宽光谱范围内表达多种光学材料介电响应的色散模型。使用椭圆光度法和分光光度法表征了通过在硅基板上真空蒸发制备的氧化f膜，证明了该通用色散模型在特定材料上的应用。表征利用覆盖宽光谱范围的多种技术和仪器对数据进行的同时处理，包括表征衬底背面的粗糙度，不均匀性，过渡层和自然氧化层。它显示了从样品两面反射的光和透射光的测量值的组合如何允许分离膜和基材中的弱吸收。这种方法在IR区域中尤其有用，在IR区域中，薄膜和基板中的吸收结构经常会重叠，因此可能需要对裸露的基板进行事先测量以进行精确分离。详细讨论了引起介电响应的各个现象，即带间电子跃迁，涉及局部态的电子激发和声子吸收。利用局部状态吸收的定量分析，可以将局部状态之间的跃迁与局部状态与扩展状态之间的跃迁分开，用于获得局部状态密度和薄膜化学计量的估计值。 （C）2015年美国眼镜学会

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