Analysis of the thickness uniformity improved by using wire masks for coating optical bandpass filters

Jin-Cherng Hsu

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Analysis of the thickness uniformity improved by using wire masks for coating optical bandpass filters

机译：通过使用金属掩膜涂覆光学带通滤光片改善厚度均匀性的分析

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Layer uniformity was improved by using a wire mask in the fabrication of a coarse wavelength division multiplexer (CWDM) filter. Theoretical simulations determined the optimal diameter of the wire to be placed just below the substrate, which was rotated at 800 rpm during E-beam evaporation. This simulation also demonstrated the correction of the thickness distribution by the etching effect of ion-assisted deposition. In the corresponding experiment, a distribution uniformity of 0.083% in the radial range from 35 to 65 mm was achieved by the coating of the CWDM filter.

机译：通过在粗波分复用器（CWDM）滤波器的制造中使用金属丝掩模来提高层的均匀性。理论模拟确定了放置在基板正下方的最佳导线直径，该导线在电子束蒸发过程中以800 rpm的速度旋转。该模拟还证明了通过离子辅助沉积的蚀刻效应来校正厚度分布。在相应的实验中，通过涂覆CWDM过滤器，在35到65 mm的径向范围内实现了0.083％的分布均匀性。

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《Applied optics》 |2014年第7期|共7页
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Jin-Cherng Hsu;
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1. Analysis of the thickness uniformity improved by using wire masks for coating optical bandpass filters [J] . Jin-Cherng Hsu Applied optics . 2014,第7期

机译：通过使用金属掩膜涂覆光学带通滤光片改善厚度均匀性的分析
2. Optical Interference Coatings Design Contest 2007: triple bandpass filter and nonpolarizing beam splitter [J] . Markus Tilsch, Karen Hendrix Applied optics . 2008,第13期

机译：2007年光学干涉涂层设计大赛：三重带通滤波器和非偏振分束器
3. Improving the sharpness of a non-uniformly illuminated image by an integral mask-filtering approach [J] . Yang C.-C. Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2013,第21期

机译：通过集成的遮罩过滤方法提高不均匀照明图像的清晰度
4. Mask in thickness uniformity for three coating materials [C] . Cheng-Chung Jaing, Kai-Lun Wu, Jing-Han Xie, Current developments in lens design and optical engineering XVIII . 2017

机译：三种涂料的厚度均匀性掩膜
5. Experimental and modeling analysis for developing improved electron beam processing capabilities for precision optical coatings. [D] . Xu, Bing. 2007

机译：开发用于精密光学涂层的改进电子束处理能力的实验和模型分析。
6. Improving the Pass-Band Return Loss in Liquid Crystal Dual-Mode Bandpass Filters by Microstrip Patch Reshaping [O] . Javier Torrecilla, Virginia Urruchi, José Manuel Sánchez-Pena, 2014

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7. Erratum: Wang et al. Optimised Performance of Non-Dispersive Infrared Gas Sensors Using Multilayer Thin Film Bandpass Filters. Coatings 2018, 8, 472 [O] . Pinggui Wang, Xiuhua Fu, Des Gibson, 2019

机译：错误：Wang等人。使用多层薄膜带通滤波器的非分散红外气体传感器的优化性能。涂料2018,8,472
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Analysis of the thickness uniformity improved by using wire masks for coating optical bandpass filters

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