• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied optics >Three dimensional polymer waveguide using hybrid lithography
【24h】

Three dimensional polymer waveguide using hybrid lithography

机译：使用混合光刻的三维聚合物波导

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A three dimensional polymer waveguide with taper structure was demonstrated and fabricated by a reliable and effective hybrid lithography. The hybrid lithography consists of lithography to fabricate a polymer waveguide and gray scale lithography to fabricate a polymer taper structure. Laser ablation and shadow aluminum evaporation were designed for gray scale lithography. The length of the gray scale region ranging from 20 to 400 mu m could be controlled by the laser power, the ablation speed, and the aluminum thickness. The slope angle was determined by the length of the gray scale region and the thickness of the photoresist. The waveguide taper structure could be transferred to the lower layer by the etching method. The taper structure can be used for integration of the waveguide with different dimensions. (C) 2015 Optical Society of America
机译：通过可靠和有效的混合光刻技术演示并制造了具有锥状结构的三维聚合物波导。混合光刻包括用于制造聚合物波导的光刻和用于制造聚合物锥形结构的灰度光刻。激光烧蚀和阴影铝蒸发设计用于灰度光刻。可以通过激光功率，烧蚀速度和铝厚度来控制20至400μm范围内的灰阶区域的长度。倾斜角由灰度区域的长度和光刻胶的厚度确定。波导锥形结构可以通过蚀刻方法转移到下层。锥形结构可用于集成具有不同尺寸的波导。 （C）2015年美国眼镜学会

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号