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Concept and modeling analysis of a high fidelity multimode deformable mirror

机译：高保真多模可变形镜的概念与建模分析

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Conventional deformable mirrors (DM) cannot meet the requirement of aberration controlling for advanced lithography tools. This paper illustrates an approach using the property that deformation of a thin plate is similar to optical modes to realize a high fidelity multimode deformable mirror whose deformation has characteristics of optical aberration modes. The way to arrange actuators is also examined. In this paper, a 36-actuator deformable mirror is taken as an example to generate low-order Zernike modes. The result shows that this DM generates the fourth fringe Zernike mode (Z4) defocus, and primary aberration Z5-Z8 with an error less than 0.5%, generates the fifth-order aberration Z10-Z14, and generates the seventh-order aberration Z17-Z20 with an error less than 1.1%. The high fidelity replication of the Zernike mode indicates that the DM satisfies the demand of controlling aberrations corresponding to the first 20 Zernike modes in an advanced lithography tool. (C) 2015 Optical Society of America
机译：传统的可变形反射镜（DM）不能满足高级光刻工具的像差控制要求。本文阐述了一种利用薄板的变形类似于光学模式的特性来实现一种高保真度的多模式可变形反射镜的方法，该变形镜具有光学像差模式的特征。还检查了执行器的布置方式。本文以36致动器可变形反射镜为例来生成低阶Zernike模式。结果显示该DM产生第四条纹Zernike模式（Z4）散焦，误差小于0.5％的主像差Z5-Z8产生五阶像差Z10-Z14，并产生七阶像差Z17- Z20的误差小于1.1％。 Zernike模式的高保真复制表明DM满足了在高级光刻工具中控制与前20个Zernike模式相对应的像差的要求。 （C）2015年美国眼镜学会

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