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Accurate testing of aspheric surfaces using the transport of intensity equation by properly selecting the defocusing distance

机译：通过正确选择散焦距离，使用强度方程式进行非球面表面的精确测试

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In the last decade, the transport of intensity has been increasingly used in microscopy, wavefront sensing, and metrology. In this study, we verify by simulation and experiment the use of the transport of intensity equation (TIE) in the accurate testing of optical aspheric surfaces. Guided by simulation results and assuming that the experimental setup parameters and the conic constants are known, one can estimate an appropriate defocusing distance Delta(z) that leads to an accurate solution of the TIE. In this paper, this method is verified through the construction of a nonnulled experiment for testing the 2D profile of an aspheric surface. The theoretical method and experimental results are compared to validate the results. Finally, to validate the TIE methodology, the phase distribution obtained by TIE is compared with the phase distribution obtained by a Shack-Hartmann sensor. (C) 2016 Optical Society of America
机译：在过去的十年中，强度的传输已越来越多地用于显微镜，波前感测和计量学中。在这项研究中，我们通过仿真和实验验证了强度方程（TIE）的传输在光学非球面表面的精确测试中的使用。在仿真结果的指导下，假设实验设置参数和圆锥常数已知，则可以估算出合适的散焦距离Delta（z），从而精确解决TIE。在本文中，该方法通过构造用于测试非球面表面2D轮廓的非空实验的方法得到了验证。比较了理论方法和实验结果以验证结果。最后，为了验证TIE方法，将TIE获得的相位分布与Shack-Hartmann传感器获得的相位分布进行比较。 （C）2016美国眼镜学会

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