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Restraint of path effect on optical surface in magnetorheological jet polishing

机译:磁流变射流抛光对光学表面的路径效应的抑制

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摘要

Path effect on a polished surface always matches tool motions and manifests as mid-spatial frequency (MSF) errors in magnetorheological jet polishing processing. To control the path effect, extended methods and part-constrained paths are presented in this paper. The extended methods, Zernike extension and Neighbor-Gerchberg extension, are developed for building an extended surface with a weak edge effect in simulation. Under the constraint of the pitch principle, the unicursal part-constrained path is presented to enhance the randomness of the tool path, including path turns and dwell-point positions. Experiments are executed to validate the effectiveness of these measures for diminishing MSF errors. The peak to valley and root mean square of the surface are improved from 0.220 lambda and 0.047 lambda (lambda = 632.8 nm) to 0.064 lambda and 0.007 lambda, respectively, while simultaneously restricting the path effect. (C) 2016 Optical Society of America
机译:抛光表面上的路径效应始终与工具运动相匹配,并在磁流变喷射抛光过程中表现为中空频率(MSF)错误。为了控制路径效应,本文提出了扩展方法和零件约束路径。开发了扩展方法Zernike扩展和Neighbor-Gerchberg扩展,用于构建在仿真中具有弱边缘效应的扩展表面。在节距原理的约束下,提出了单曲线部分约束路径,以增强刀具路径的随机性,包括路径转弯和停留点位置。执行实验以验证这些措施减少MSF错误的有效性。表面的峰谷和均方根分别从0.220λ和0.047λ(λ= 632.8 nm)提高到0.064λ和0.007λ,同时限制了路径效应。 (C)2016美国眼镜学会

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