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Angle-of-incidence performance of random anti-reflection structures on curved surfaces

机译：曲面上随机抗反射结构的入射角性能

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Random anti-reflection structured surfaces (rARSS) have been reported to improve transmittance of optical-grade fused silica planar substrates to values greater than 99%. These textures are fabricated directly on the substrates using reactive-ion etching techniques, and often result in transmitted spectra with no measurable interference effects (fringes) for a wide range of wavelengths. The inductively coupled reactive-ion plasma (ICP-RIE) used in the fabrication process to etch the rARSS is anisotropic and thus well suited for planar components. The improvement in spectral transmission has been found to be independent of optical incidence angles for values from 0 degrees to +/- 30 degrees. Qualifying and quantifying the rARSS performance on curved substrates, such as convex lenses, is required to optimize the fabrication of the desired AR effect on optical-power elements. In this work, rARSS was fabricated on fused silica plano-convex lenses using a planar-substrate optimized ICP-RIE process to maximize optical transmission in the range from 500 to 1100 nm. Results are presented from optical transmission tests of rARSS lenses for both TE and TM incident polarizations at a wavelength of 633 nm and over a 70 degrees full field of view. These results suggest optimization of the fabrication process to account for anisotropy is not required, mainly due to the wide angle-of-incidence AR tolerance performance of the rARSS lenses. (C) 2016 Optical Society of America
机译：据报道，随机的抗反射结构化表面（rARSS）可将光学级熔融石英平面基板的透射率提高到大于99％。这些纹理是使用反应离子刻蚀技术直接在基板上制造的，并且通常导致透射的光谱在很宽的波长范围内都没有可测量的干涉效应（条纹）。在制造过程中用来蚀刻rARSS的感应耦合反应离子等离子体（ICP-RIE）是各向异性的，因此非常适合于平面组件。已经发现，对于从0度到+/- 30度的值，光谱透射的改善与光学入射角无关。需要对弯曲的基板（例如凸透镜）上的rARSS性能进行鉴定和量化，以优化对光功率元件的所需AR效应的制造。在这项工作中，使用经过优化的平面基板ICP-RIE工艺在熔融石英平凸透镜上制造了rARSS，以最大化500至1100 nm范围内的光透射率。结果来自rARSS透镜在633 nm波长和70度全视场上的TE和TM入射偏振的光学透射测试。这些结果表明，不需要优化制造工艺以解决各向异性问题，这主要是由于rARSS透镜的宽入射角AR耐受性能。 （C）2016美国眼镜学会

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