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Parameter correction method for dual position-sensitive-detector-based unit

机译:基于双位置敏感检测器的单元的参数校正方法

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A dual position-sensitive-detector (PSD)-based unit can be used for angular measurements of a multi-degree-of-freedom measurement system and a laser interferometry-based sensing and tracking system. In order to ensure the precision of incident beam direction measurement for a PSD-based unit, model and autoreflection alignment methods for correction of PSD-based unit parameters are proposed. Experimental results demonstrate the deviations between the angular measurements obtained using a dual PSD-based unit and an autocollimator varied by 70 '', 20 '', and 1 '' for three runs of the autoreflection alignment method, respectively, and the model method deviations all varied by 1 '' in the 1000 '' measurement range for three runs. It is therefore concluded that the model method is more reliable than the autoreflection alignment method for ensuring the accuracy of a dual PSD-based unit. (C) 2016 Optical Society of America
机译:基于双位置敏感检测器(PSD)的单元可用于多自由度测量系统和基于激光干涉测量的传感和跟踪系统的角度测量。为了确保基于PSD的单元的入射光束方向测量的精度,提出了用于校正基于PSD的单元参数的模型和自动反射对准方法。实验结果表明,使用三个基于PSD的双单元和一个自动准直仪获得的角度测量值之间的偏差分别针对三种自动反射对准方法分别变化了70'',20''和1''。在1000英寸的测量范围内,所有3次运行都变化了1英寸。因此可以得出结论,对于确保基于双PSD的单元的准确性,模型方法比自动反射对齐方法更可靠。 (C)2016美国眼镜学会

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