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Interferometric surface mapping of a spherical proof mass for ultra precise inertial reference sensors

机译:用于超精密惯性参考传感器的球形检验质量块的干涉表面图

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In the context of our investigations on novel inertial reference sensors for space applications, we have explored a design utilizing an optical readout of a spherical proof mass. This concept enables full drag-free operations, hence reducing proof mass residual acceleration noise to a minimum. The main limitations of this sensor are errors in position determination of the center of mass of the proof mass due to the surface topography and the involved path length changes upon rotation. One solution is to apply a surface map for correction of the measurement data, thus improving the precision of position determination. This article presents the results of our one-dimensional interferometric surface topography measurements of a sphere, achieving uncertainties of approximate to 10 nm, as a first step to realize a complete surface map. The measurement setup consists of two heterodyne interferometers positioned in an opposing configuration, which measure the surface topography while the sphere is continuously rotated by a rotation stage. (C) 2016 Optical Society of America
机译:在我们对用于太空应用的新型惯性参考传感器的研究中,我们探索了一种利用球形检验质量的光学读数的设计。该概念可实现完全无阻力的操作,从而将标准质量残余加速度噪声降至最低。该传感器的主要局限性是由于表面形貌而导致的检测质量质心位置确定错误,并且所涉及的路径长度在旋转时发生变化。一种解决方案是应用表面图来校正测量数据,从而提高位置确定的精度。本文介绍了我们对球体进行一维干涉式表面形貌测量的结果,实现了大约10 nm的不确定性,这是实现完整表面图的第一步。测量设置包括两个以相对配置放置的外差干涉仪,当球体通过旋转平台连续旋转时,它们测量表面形貌。 (C)2016美国眼镜学会

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