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Study on the mechanism of a charge-coupled device detector irradiated by millisecond pulse laser under functional loss

机译：功能损失下毫秒脉冲激光辐照电荷耦合器件探测器的机理研究

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摘要

The damage mechanism of a CCD detector was studied by building an experimental system containing a millisecond pulse laser irradiating a CCD detector. The experimental results show that the damage on the CCD detector was mainly thermal damage, along with mechanical damage. A melting phenomenon was caused by the thermal damage, so that a crater was observed on the surface of the CCD detector. Caused by melting of the polysilicon electrodes and a temperature rise in the silicon dioxide, the shift register impedance values were sharply reduced. Most of the substrate clock signals were broken and disappeared due to melting of channels in the silicon substrate layer, which caused a functional loss for the CCD detector. The mechanical damage on the melting edge of the CCD detector created heave; the temperature gradient caused this damage. In this paper, the decrease in vertical shift register impedance values was consistent with previous test results. (C) 2016 Optical Society of America
机译：通过建立一个包含一个照射CCD检测器的毫秒脉冲激光的实验系统，研究了CCD检测器的损坏机理。实验结果表明，CCD探测器的损坏主要是热损坏，以及机械损坏。由于热损伤而导致熔化现象，从而在CCD检测器的表面上观察到了缩孔。由于多晶硅电极的熔化和二氧化硅的温度升高，移位寄存器的阻抗值急剧降低。大多数衬底时钟信号由于硅衬底层中通道的熔化而破裂并消失，这导致了CCD检测器的功能损失。 CCD检测器融化边缘的机械损坏会产生隆起;温度梯度造成了这种损坏。本文中，垂直移位寄存器阻抗值的降低与先前的测试结果一致。 （C）2016美国眼镜学会

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