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Influence of annealing conditions on the formation of regular lattices of voids and Ge quantum dots in an amorphous alumina matrix

机译:退火条件对非晶态氧化铝基体中空洞和锗量子点规则晶格形成的影响

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In this work, the influence of air pressure during the annealing of Ge quantum dot (QD) lattices embedded in an amorphous Al _2O _3 matrix on the structural, morphological and compositional properties of the film is studied. The formation of a regularly ordered void lattice after performing a thermal annealing process is explored. Our results show that both the Ge desorption from the film and the regular ordering of the QDs are very sensitive to the annealing parameters. The conditions for the formation of a void lattice, a crystalline Ge QD lattice and a disordered QD lattice are presented. The observed effects are explained in terms of oxygen interaction with the Ge present in the film.
机译:在这项工作中,研究了嵌入非晶Al _2O _3基质中的Ge量子点(QD)晶格退火期间的气压对薄膜结构,形态和组成特性的影响。探索了在执行热退火过程之后规则排列的空隙晶格的形成。我们的结果表明,薄膜中的Ge脱附和QD的规则排列对退火参数非常敏感。给出了形成空隙晶格,晶体Ge QD晶格和无序QD晶格的条件。观察到的效果是通过氧与薄膜中存在的Ge的相互作用来解释的。

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