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2D plasmonic and diffractive structures with sharp features by UV laser patterning

机译：通过紫外激光图案化，具有清晰特征的二维等离激元和衍射结构

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摘要

The aim of this work is to produce 2D plasmonic and diffractive structures in Ag films with sharp features for which both a deeper understanding of laser induced transformation upon modulated laser intensity and a correlation between structural and optical properties are required. We compare results obtained by exposing silver films to an excimer laser operating at 193 nm whose intensity is either modulated or homogeneous. In all cases, one laser exposure is enough to break the film into nanoparticles (NPs). The use of the modulated beam intensity leads to diffractive 2D patterns that are formed by rectangular regions of untransformed material surrounded by transformed regions covered by NPs. The former have sharp edges that are consistent with the absence of significant mass transport that is discussed in terms of the thermal gradient induced. The latter contain NPs whose diameter increases as the initial film effective thickness increases. The surface plasmons associated with the NPs in the transformed regions dominate the reflectivity spectrum and the 2D array formed by the untransformed regions is responsible for the diffractive properties. Evidence for spinodal dewetting is only observed in our case for the steep gradient conditions achieved at the border of the homogeneously irradiated regions.
机译：这项工作的目的是在具有尖锐特征的Ag薄膜中产生二维等离激元和衍射结构，为此既需要更深入地了解调制激光强度后的激光诱导转变，也需要结构和光学性质之间的相关性。我们比较通过将银膜暴露在工作于193 nm的受激准分子激光器上而获得的结果，该激元激光器的强度被调制或均匀。在所有情况下，一次激光照射都足以将薄膜破碎成纳米颗粒（NP）。调制光束强度的使用导致衍射2D图案，该2D图案由未转化材料的矩形区域形成，该矩形区域被NP覆盖的转化区域包围。前者具有锋利的边缘，这与不存在根据传热梯度讨论的显着质量传递相一致。后者包含直径随初始膜有效厚度增加而增加的NP。与变换区域中的NP相关的表面等离激元支配着反射光谱，由未变换区域形成的2D阵列负责衍射特性。仅在我们的情况下，才能观察到旋节线去湿的证据，该条件是在均匀照射区域的边界处实现了陡峭的梯度条件。

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