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首页> 外文期刊>Nanotechnology >Experimental determination of mode correction factors for thermal method spring constant calibration of AFM cantilevers using laser Doppler vibrometry
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Experimental determination of mode correction factors for thermal method spring constant calibration of AFM cantilevers using laser Doppler vibrometry

机译：使用激光多普勒振动法对AFM悬臂梁的热法弹簧常数校准进行模式校正因子的实验确定

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摘要

Mode correction factors (MCFs) represent a significant adjustment to the spring constant values measured using the thermal cantilever calibration method. Usually, the ideal factor of 0.971 for a tipless rectangular cantilever is used, which adjusts the value by 3% for the first flexural mode. An experimental method for determining MCFs has been developed that relies on measuring the areas under the first few resonance peaks for the flexural mode type. Using this method, it has been shown that MCFs for the first flexural mode of commercially available atomic force microscope cantilevers actually vary from 0.95 to 1.0, depending on the shape and end mass of the cantilever. Triangular shaped cantilevers tend to lower MCFs with tipless versions providing the lowest values. Added masses (including tips) tend to increase the first flexural mode's MCF to higher values with large colloid probes at the high extreme. Using this understanding and applying it to the recently developed laser Doppler vibrometry thermal calibration method it is now possible to achieve very accurate and precise cantilever spring constant calibrations (uncertainties close to ±1%) with commonly available commercial cantilevers such as tipped rectangular and triangular cantilevers, and colloid probes.
机译：模式校正因子（MCF）表示对使用热悬臂校准方法测得的弹簧常数值的重大调整。通常，使用无尖矩形悬臂的理想系数0.971，这对于第一种弯曲模式将其值调整了3％。已经开发出一种确定MCF的实验方法，该方法依赖于测量挠曲模式类型的前几个共振峰下的面积。使用这种方法，已经表明，根据悬臂的形状和端部质量，用于市售原子力显微镜悬臂的第一弯曲模式的MCF实际上在0.95到1.0之间变化。三角形悬臂往往会降低MCF，而无尖头版本的MCF值最低。附加的质量（包括尖端）往往会在较大的极端条件下使用大型胶体探针将第一弯曲模式的MCF值提高至更高的值。利用这种理解并将其应用到最新开发的激光多普勒振动热校准方法中，现在可以通过常见的商用悬臂（如尖角矩形和三角形悬臂）实现非常准确和精确的悬臂弹簧常数校准（不确定度接近±1％）和胶体探针。

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