A method for the simultaneous calibration of the spring constants of all flexural modes of microcantilevers is presented. It is based on a flow of gas from a microchannel that interacts with the microcantilever. The gas flow causes a measurable shift in the resonance frequencies of thermal noise spectra of the flexural modes. From the magnitude of the frequency shifts of the individual modes the spring constants can be determined with high accuracy and precision. The method is non-invasive and does not risk damage to the cantilever. Experimental data are presented for several V-shaped and rectangular cantilevers with nominal fundamental spring constants in the range of 0.03-1.75 N m ~(-1). The spring constants of the fundamental modes compare favorably to those obtained using the Sader method. The higher modes of oscillation are readily calibrated with experimental uncertainties of 5-10%.
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机译：提出了一种同时校准微悬臂梁所有弯曲模式的弹簧常数的方法。它基于来自与微悬臂相互作用的微通道的气流。气流导致弯曲模式的热噪声谱的共振频率发生可测量的偏移。从各个模式的频率偏移的大小，可以以高精度和高精度确定弹簧常数。该方法是非侵入性的，并且没有损坏悬臂的风险。给出了几种V形和矩形悬臂的实验数据，其名义基本弹簧常数在0.03-1.75 N m〜（-1）范围内。基本模式的弹簧常数与使用Sader方法获得的弹簧常数相比具有优势。较高的振荡模式很容易用5-10％的实验不确定性进行校准。
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