Facile route of flexible wire grid polarizer fabrication by angled-evaporations of aluminum on two sidewalls of an imprinted nanograting

Shin Y.J.; Pina-Hernandez C.; Wu Y.-K.; Ok J.G.; Guo L.J.

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Facile route of flexible wire grid polarizer fabrication by angled-evaporations of aluminum on two sidewalls of an imprinted nanograting

机译：通过在压印纳米光栅的两个侧壁上进行铝的有角度蒸发来制造柔性线栅偏振器的便捷途径

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In this study, we report a new method to fabricate a wire grid polarizer (WGP) that greatly relaxes the requirement on patterning and etching, and can be easily applied to produce flexible WGPs. The technique is to pattern a high aspect ratio and narrow linewidth grating by nanoimprint lithography followed by two angled aluminum depositions in opposite directions to produce the narrow spacing between the aluminum lines required for a visible band WGP. Anisotropic reactive ion etching is used to remove the aluminum deposited at the top of the grating but leave the aluminum layer on the grating sidewalls, thereby forming a metal wire grid with much smaller spacings than a lithographically defined grating. As a result, the fabricated WGP showed good performance in a wide range of visible wavelength.

机译：在这项研究中，我们报告了一种制造线栅偏振器（WGP）的新方法，该方法极大地放宽了对图案和蚀刻的要求，并且可以轻松地用于生产柔性WGP。该技术是通过纳米压印光刻技术在高纵横比和窄线宽光栅上进行图案化，然后在相反的方向进行两次成角度的铝沉积，以在可见光带WGP所需的铝线之间产生狭窄的间距。各向异性反应离子刻蚀用于去除沉积在光栅顶部的铝，但将铝层留在光栅侧壁上，从而形成间距比光刻定义的光栅小得多的金属线栅。结果，制造的WGP在宽的可见波长范围内显示出良好的性能。

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《Nanotechnology》 |2012年第34期|共6页
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Shin Y.J.; Pina-Hernandez C.; Wu Y.-K.; Ok J.G.; Guo L.J.;
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1. Facile route of flexible wire grid polarizer fabrication by angled-evaporations of aluminum on two sidewalls of an imprinted nanograting [J] . Shin Y.J., Pina-Hernandez C., Wu Y.-K., Nanotechnology . 2012,第34期

机译：通过在压印纳米光栅的两个侧壁上进行铝的有角度蒸发来制造柔性线栅偏振器的便捷途径
2. Design and Fabrication of Bilayer Wire Grid Polarizer Using Ultraviolet Replicated Nanograting against Nickel Electroformed Nanostamp [J] . Jonghyun Ju, Yun-ah Han, Jwasun Kim, Japanese journal of applied physics . 2013,第10ISSUE2期

机译：紫外线复制纳米光栅对镍电铸纳米印章的双层线栅偏振器的设计与制作
3. UV-NIL based nanostructuring of aluminum using a novel organic imprint resist demonstrated for 100 nm half-pitch wire grid polarizer [J] . Schlachter Florian, Barnett Julian, Plachetka Ulrich, Microelectronic Engineering . 2016,第Apra期

机译：使用新型有机压印抗蚀剂对铝进行基于UV-NIL的铝纳米结构研究，证明其可用于100 nm半间距线栅偏振器
4. Direct imprinting on chalcogenide glass and fabrication of infrared wire-grid polarizer [C] . Itsunari Yamada, Naoto Yamashita, Toshihiko Einishi, Integrated photonics: Materials, devices, and applications II . 2013

机译：直接印在硫族化物玻璃上和红外线栅偏振器的制造
5. Nano-wire fabrication using anodic aluminum oxide as the template: Experimental studies of low-temperature anodization, electrodeposition and band gap measurement of cadmium sulfide nano-wires using resonance Raman spectroscopy. [D] . Chan, Jimmy. 1998

机译：以阳极氧化铝为模板的纳米线制造：使用共振拉曼光谱法对硫化镉纳米线进行低温阳极氧化，电沉积和带隙测量的实验研究。
6. Facile fabrication of wire-type indium gallium zinc oxide thin-film transistors applicable to ultrasensitive flexible sensors [O] . Yeong-gyu Kim, Young Jun Tak, Hee Jun Kim, -1

机译：易于制造适用于超灵敏柔性传感器的线型铟镓锌氧化物薄膜晶体管
7. Facile route of flexible wire grid polarizer fabrication by angled-evaporations of aluminum on two sidewalls of an imprinted nanograting [O] . Young Jae Shin, Carlos Pina-Hernandez, Yi-Kuei Wu, 2012

机译：柔性丝网偏振器通过铝的蒸发在印迹纳米槽的两个侧壁上的成角度蒸发
8. From Minerals to Materials: A Facile Synthetic Route to Preceramic Polymers for Aluminum Oxide. [R] . Apblett, A. W., Landry, C. C., Mason, M. W., 1992

机译：从矿物到材料：用于氧化铝的陶瓷前体聚合物的简便合成路线。

Facile route of flexible wire grid polarizer fabrication by angled-evaporations of aluminum on two sidewalls of an imprinted nanograting

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