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GaN wire-based Langmuir-Blodgett films for self-powered flexible strain sensors

机译:用于自供电柔性应变传感器的基于GaN线的Langmuir-Blodgett膜

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摘要

We report a highly flexible strain sensor which exploits the piezoelectric properties of ultra-long gallium nitride (GaN) wires. Langmuir-Blodgett assembled wires are encapsulated in a dielectric material (parylene-C), which is sandwiched between two planar electrodes in a capacitor-like configuration. Through FEM simulations we show that encapsulating densely aligned conical wires in a properly designed dielectric layer can maximize the amplitude of the generated piezoelectric output potential. According to these considerations we designed and fabricated macroscopic flexible strain sensors (active area:1.5 cm~2). The sensor was actuated in three point configuration inducing curvature radii of less than 10 cm and has a typical force sensitivity of 30 mV N~(-1).
机译:我们报告了一种高度灵活的应变传感器,该传感器利用了超长氮化镓(GaN)线的压电特性。 Langmuir-Blodgett组装线被封装在介电材料(聚对二甲苯-C)中,该介电材料以电容器状配置夹在两个平面电极之间。通过FEM仿真,我们表明将密集排列的锥形导线封装在适当设计的介电层中可以使所产生的压电输出电势的振幅最大化。基于这些考虑,我们设计并制造了宏观柔性应变传感器(有效面积:1.5 cm〜2)。该传感器以三点配置致动,其曲率半径小于10 cm,典型的力敏感度为30 mV N〜(-1)。

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