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Optical racetrack resonator transduction of nanomechanical cantilevers

机译：纳米机械悬臂的光学跑道共振器转导

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摘要

Optomechanical transduction has demonstrated its supremacy in probing nanomechanical displacements. In order to apply nano-optomechanical systems (NOMS) as force and mass sensors, knowledge about the transduction responsivity (i.e. the change in measured optical transmission with nanomechanical displacement) and its tradeoffs with system design is paramount. We compare the measured responsivities of NOMS devices with varying length, optomechanical coupling strength g_(om), and optical cavity properties. Cantilever beams 1.5 to 5 μm long are fabricated 70 to 160 nm from a racetrack resonator optical cavity and their thermomechanical (TM) noise signals are measured. We derive a generic expression for the transduction responsivity of the NOMS in terms of optical and mechanical system parameters such as finesse, optomechanical coupling constant, and interaction length. The form of the expression holds direct insight as to how these parameters affect the responsivity. With this expression, we obtain the optomechanical coupling constants using only measurements of the TM noise power spectra and optical cavity transmission slopes. All optical pump/probe operation is also demonstrated in our side-coupled cantilever-racetrack NOMS. Finally, to assess potential operation in a gas sensing environment, the TM noise signal of a device is measured at atmospheric pressure.
机译：光学机械转导已证明其在探测纳米机械位移方面具有优势。为了将纳米光学机械系统（NOMS）用作力传感器和质量传感器，关于转导响应度（即随着纳米机械位移而变化的测得的光学透射率）及其在系统设计中的权衡取舍至关重要。我们比较了具有不同长度，光机械耦合强度g_（om）和光腔特性的NOMS设备的测量响应度。从赛道谐振腔光学腔中制造70至160 nm长的1.5至5μm长的悬臂梁，并测量其热机械（TM）噪声信号。我们根据光学和机械系统参数（如精细度，光机耦合常数和相互作用长度）得出NOMS的传导响应性的通用表达式。表达式的形式可以直接了解这些参数如何影响响​​应度。通过该表达式，我们仅使用TM噪声功率谱和光腔传输斜率的测量值即可获得光机械耦合常数。我们的侧面耦合悬臂-跑道NMS还展示了所有光泵/探头的操作。最后，为了评估在气体传感环境中的潜在操作，在大气压力下测量设备的TM噪声信号。

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