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Temperature-dependent capillary forces at nano-contacts for estimating the heat conduction through a water meniscus

机译：纳米接触处与温度有关的毛细管力，用于估算通过水弯月面的热传导

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摘要

The temperature dependence of the capillary forces at nano-sized contacts is investigated. Two different resistive scanning thermal microscopy (SThM) nanoprobes are used in this study. Measurements of the capillary forces are reported as a function of the probe temperature on hydrophilic samples of different thermal properties. These forces appear to be largely reduced for probe temperatures larger than a threshold temperature, where the value depends on the sample thermal conductance. This could pave the way to an alternative solution to reduce the stiction in nano/micro-electromechanical (NEMS/MEMS) devices. The dimensions of the water meniscus at the probe-sample contact were then estimated. Moreover, these results help the evaluation of thermal conductance through the water meniscus. It is found, through this work, that the values of the thermal conductance through the water meniscus can represent 6% of those of the contact thermal conductance in the case of the KNT probe (from Kelvin nanotechnology). These values can be equal to 4% of those of thermal conduction in the cantilever-sample air gap in the case of a doped-silicon probe.
机译：研究了纳米触点上毛细作用力的温度依赖性。在这项研究中使用了两种不同的电阻扫描热显微镜（SThM）纳米探针。据报道，在不同热性质的亲水性样品上，毛细作用力的测量是探针温度的函数。对于大于阈值温度的探针温度，这些力似乎已大大降低，该温度取决于样品的热导率。这可以为减少纳米/微机电（NEMS / MEMS）设备的静摩擦的替代解决方案铺平道路。然后估计在探针-样品接触处的水弯液面的尺寸。此外，这些结果有助于评估通过水弯月面的热导率。通过这项工作，发现通过水弯月面的热导率值可以代表接触热导率（对于KNT探针（来自开尔文纳米技术公司））的6％。在掺杂硅探针的情况下，这些值可以等于悬臂样品气隙中热导率的4％。

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