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Electrochemical synthesis of highly ordered nanowires with a rectangular cross section using an in-plane nanochannel array

机译：使用面内纳米通道阵列电化学合成具有矩形截面的高度有序的纳米线

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摘要

Rapid and reproducible assembly of aligned nanostructures on a wafer-scale is a crucial, yet one of the most challenging tasks in the incorporation of nanowires into integrated circuits. We present the synthesis of a periodic nanochannel template designed for electrochemical growth of perfectly aligned, rectangular nanowires over large areas. The nanowires can be electrically contacted and characterized in situ using a pre-patterned multi-point measurement platform. During the measurement the wires remain within a thick oxide matrix providing protection against breaking and oxidation. We use laser interference lithography, reactive ion etching and atomic layer deposition to create cm-long parallel nanochannels with characteristic dimensions as small as 40 nm. In a showcase study pulsed electrodeposition of iron is carried out creating rectangular shaped iron nanowires within the nanochannels. By design of the device, the grown wires are in contact with an integrated electrode system on both ends directly after the deposition. No further processing steps are required for electrical characterization, minimizing the risk of damage and oxidation. The developed nanowire measurement device allows for multi-probe resistance measurements and can easily be adopted for transistor applications. The guided, in-plane growth of electrodeposited nanowire arrays which are tunable in size and density paves the way for the incorporation of nanowires into a large variety of multifunctional devices.
机译：在晶片级上快速且可重现地组装对准的纳米结构是至关重要的，但是在将纳米线结合到集成电路中时，这也是最具挑战性的任务之一。我们提出了周期性纳米通道模板的合成，该模板设计用于在大面积上完美对齐的矩形纳米线的电化学生长。可以使用预先设置的多点测量平台对纳米线进行电接触和原位表征。在测量过程中，导线保留在厚的氧化物基质中，以防止断裂和氧化。我们使用激光干涉光刻，反应离子刻蚀和原子层沉积来创建特征尺寸小至40 nm的厘米长的平行纳米通道。在一个陈列柜研究中，进行了铁的脉冲电沉积，从而在纳米通道内创建了矩形的铁纳米线。通过设备的设计，生长后的金属丝在沉积后立即与两端的集成电极系统接触。电气特性不需要进一步的处理步骤，从而将损坏和氧化的风险降至最低。研发的纳米线测量设备可进行多探针电阻测量，可轻松用于晶体管应用。尺寸和密度可调的电沉积纳米线阵列在平面内的引导生长，为将纳米线结合到各种多功能设备中铺平了道路。

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