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Density patterns in metal films produced by laser interference

机译：激光干涉产生的金属膜中的密度图案

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Fringed periodic patterns have been produced by laser interference at 193 nm in an almost continuous 9.5 nm-thick Ag film that exhibits a number density of approximate to 189 mu m(-2) holes. Patterns with four periods in the range of 1.8-10.2 mu m were produced by changing the projection optics. At high fluences, the film breaks up into nanostructures around the regions exposed to intensity maxima due to laser-induced melting. At low fluences, a new process is observed that is triggered at the initial holes of the film by solid-state dewetting. Once the fluence is high enough to prevent the temperature balance across the pattern, mass transport from cold to hot regions is observed, leading to film densification in regions around intensity maxima sites. The novel patterns are thus formed by fringes of material that is more/less dense than the as-grown film, each of which is located at intensity maxima/minima sites, and have negligible topography. Comparing the present results to earlier reports in the literature shows that the thermal gradient across the pattern is influenced by the initial film microstructure, rather than by the thickness. The existence of a minimum period, which is achievable depending on the thermal continuity of the film, is also discussed.
机译：通过在几乎连续的9.5 nm厚的Ag膜中以193 nm的激光干涉产生带条纹的周期性图案，该Ag膜的孔数密度约为189μm（-2）。通过改变投影光学系统，可以产生四个周期在1.8-10.2μm范围内的图形。在高通量下，由于激光诱导的熔化，薄膜在暴露于最大强度的区域周围分解成纳米结构。在低注量下，观察到一种新工艺，该工艺通过固态去湿在膜的初始孔处触发。一旦注量足够高以防止整个图案上的温度平衡，就会观察到从冷区到热区的质量迁移，从而导致强度最大值部位附近的膜致密化。因此，新颖的图案由材料条纹形成，该材料条纹比所生长的膜密度更高/更低，每个膜都位于最大/最小强度位置，并且形貌可忽略。将当前结果与文献中的较早报告进行比较表明，整个图案上的热梯度受初始薄膜微结构的影响，而不是厚度的影响。还讨论了最小周期的存在，该最小周期取决于薄膜的热连续性。

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