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A FIB induced boiling mechanism for rapid nanopore formation

机译：FIB诱导的快速形成纳米孔的沸腾机理

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摘要

Focused ion beam (FIB) technology is widely used to fabricate nanopores in solid-state membranes. These nanopores have desirable thermomechanical properties for applications such as high-throughput DNA sequencing. Using large scale molecular dynamics simulations of the FIB nanopore formation process, we show that there is a threshold ion delivery rate above which the mechanism underlying nanopore formation changes. At low rates nanopore formation is slow, with the rate proportional to the ion flux and therefore limited by the sputter rate of the target material. However, at higher fluxes nanopores form via a thermally dominated process, consistent with an explosive boiling mechanism. In this case, mass is rapidly rearranged via bubble growth and coalescence, much more quickly than would occur during sputtering. This mechanism has the potential to greatly speed up nanopore formation.
机译：聚焦离子束（FIB）技术被广泛用于制造固态膜中的纳米孔。这些纳米孔对于诸如高通量DNA测序的应用具有理想的热机械性质。使用FIB纳米孔形成过程的大规模分子动力学模拟，我们表明存在阈值离子传递速率，高于该阈值离子传递速率的基础是纳米孔形成的机制发生变化。在低速率下，纳米孔形成缓慢，速率与离子通量成比例，因此受靶材料的溅射速率限制。然而，在较高的通量下，通过热控制过程形成纳米孔，这与爆炸沸腾机理一致。在这种情况下，质量会通过气泡增长和聚结而迅速重新排列，比溅射过程中发生的速度要快得多。该机制具有极大地加速纳米孔形成的潜力。

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