Hydrogen plasma-mediated modification of the electrical transport properties of ZnO nanowire field effect transistors

Hong Woong-Ki; Yoon Jongwon; Lee Takhee

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Hydrogen plasma-mediated modification of the electrical transport properties of ZnO nanowire field effect transistors

机译：氢等离子体介导的ZnO纳米线场效应晶体管电输运性质的修饰

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We investigated the effects of hydrogen plasma treatment on the electrical transport properties of ZnO nanowire field effect transistors (FETs) with a back gate configuration. After hydrogen plasma treatment of the FET devices, the effective carrier density and mobility of the nanowire FETs increased with a threshold voltage shift toward a negative gate bias direction. This can be attributed to the desorption of oxygen molecules adsorbed on the surface of the nanowire channel, to passivation and to doping effects due to the incorporation of energetic hydrogen ions generated in plasma.

机译：我们研究了氢等离子体处理对具有背栅配置的ZnO纳米线场效应晶体管（FET）的电传输特性的影响。在对FET器件进行氢等离子体处理后，纳米线FET的有效载流子密度和迁移率随着阈值电压向负栅极偏置方向的移动而增加。这可以归因于吸附在纳米线通道表面上的氧分子的解吸，钝化和归因于等离子体中产生的高能氢离子的掺入的掺杂作用。

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《Nanotechnology》 |2015年第12期|共8页
作者
Hong Woong-Ki; Yoon Jongwon; Lee Takhee;
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正文语种 eng
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ZnO nanowire; electrical transport; hydrogen plasma;

机译：ZnO纳米线;电输运;氢等离子体;

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专利

1. Hydrogen plasma-mediated modification of the electrical transport properties of ZnO nanowire field effect transistors [J] . Hong Woong-Ki, Yoon Jongwon, Lee Takhee Nanotechnology . 2015,第12期

机译：氢等离子体介导的ZnO纳米线场效应晶体管电输运性质的修饰
2. Aging-Dependent Electrical Properties in Polymer-Passivated ZnO Nanowire Field Effect Transistors [J] . Hong Woong-Ki ECS Solid State Letters . 2015,第4期

机译：聚合物钝化ZnO纳米线场效应晶体管中取决于老化的电性能
3. Electrical properties of ZnO nanowire field effect transistors with varying high-k Al2O3 dielectric thickness [J] . Journal of Applied Physics . 2010,第3期

机译：高k Al2O3介电层厚度变化的ZnO纳米线场效应晶体管的电性能
4. Electrical transport properties of VO2 nanowire field effect transistors [C] . Jongsun Maeng, Gunho Jo, Tak-Wook Kim, IEEE Nanotechnology Materials and Devices Conference . 2006

机译：VO 2 纳米线场效应晶体管的电气传输性能
5. Correlation of structure and electrical transport properties of carbon nanotubes and bundles in field-effect transistors. [D] . Kim, Taekyung. 2007

机译：场效应晶体管中碳纳米管和束的结构和电传输特性的相关性。
6. Effects of Applied Voltages on the Charge Transport Properties in a ZnO Nanowire Field Effect Transistor [O] . Jongwon Yoon, Fu Huang, Ki Hoon Shin, 2020

机译：施加电压对ZnO纳米线场效应晶体管中电荷传输特性的影响
7. Effects of Applied Voltages on the Charge Transport Properties in a ZnO Nanowire Field Effect Transistor [O] . Jongwon Yoon, Fu Huang, Ki Hoon Shin, 2020

机译：施加电压对ZnO纳米线场效应晶体管电荷传输性能的影响

Hydrogen plasma-mediated modification of the electrical transport properties of ZnO nanowire field effect transistors

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