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Towards a single step process to create high purity gold structures by electron beam induced deposition at room temperature

机译：迈向一步法，在室温下通过电子束诱导沉积产生高纯度金结构

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摘要

Highly pure metallic structures can be deposited by electron beam induced deposition and they have many important applications in different fields. The organo-metallic precursor is decomposed and deposited under the electron beam, and typically it is purified with postirradiation in presence of O-2. However, this approach limits the purification to the surface of the deposit. Therefore, `in situ' purification during deposition using simultaneous flows of both O-2 and precursor in parallel with two gas injector needles has been tested and verified. To simplify the practical arrangements, a special concentric nozzle has been designed allowing deposition and purification performed together in a single step. With this new device metallic structures with high purity can be obtained more easily, while there is no limit on the height of the structures within a practical time frame. In this work, we summarize the first results obtained for `in situ' Au purification using this concentric nozzle, which is described in more detail, including flow simulations. The operational parameter space is explored in order to optimize the shape as well as the purity of the deposits, which are evaluated through scanning electron microscope and energy dispersive x-ray spectroscopy measurements, respectively. The observed variations are interpreted in relation to other variables, such as the deposition yield. The resistivity of purified lines is also measured, and the influence of additional post treatments as a last purification step is studied.
机译：可以通过电子束诱导沉积来沉积高纯度的金属结构，并且它们在不同领域中具有许多重要的应用。有机金属前体在电子束下分解并沉积，通常在O-2存在的情况下通过后照射进行纯化。但是，这种方法将净化仅限于沉积物的表面。因此，已经测试并验证了在沉积过程中使用O-2和前体同时流动并与两个气体注入器针头并行进行的“原位”纯化。为了简化实际布置，已设计了特殊的同心喷嘴，可以在一个步骤中一起进行沉积和净化。使用这种新装置，可以更容易地获得具有高纯度的金属结构，而在实际时间范围内对结构的高度没有限制。在这项工作中，我们总结了使用该同心喷嘴进行“原位” Au纯化获得的第一个结果，将对其进行更详细的描述，包括流量模拟。探索操作参数空间以优化沉积物的形状和纯度，分别通过扫描电子显微镜和能量色散X射线光谱测量来评估沉积物的形状和纯度。相对于其他变量（例如沉积量）来解释观察到的变化。还测量了纯化线的电阻率，并研究了附加后处理作为最后一个纯化步骤的影响。

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