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Microstructuring of carbon nanotubes-nickel nanocomposite

机译：碳纳米管-镍纳米复合材料的微结构

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摘要

In this paper, we develop a novel electroplating method for the synthesis of carbon nanotubes (CNTs)-nickel (Ni) nanocomposite, and present the fabrication of a silicon micromirror with the CNTs-Ni nanocomposite beams to evaluate the mechanical stability of the micromirror in terms of resonant frequency. CNTs are pretreated to have positive charges on their surface and added into a Ni electroplating solution to form a CNTs-Ni nanocomposite electroplating suspension. The weight fraction of the CNTs in the electroplated nanocomposite is 2.4 wt%, and the ultramicroindentation hardness is 18.6 GPa. The mechanical strengthening phenomenon is found in the nanocomposite in comparison with a Ni film. Moreover, the addition of CNTs in the nanocomposite beams effectively increases the shear modulus compared with the pure Ni. The maximum variation of the resonant frequency of the micromirror during a long-term stability test is approximately 0.25%, and its scanning angle is approximately 20 degrees. It shows the potential suitability of the CNTs-Ni nanocomposite with proper design for micromechanical element applications.
机译：在本文中，我们开发了一种新颖的电镀方法来合成碳纳米管（CNTs）-镍（Ni）纳米复合材料，并提出了一种用CNTs-Ni纳米复合束制备硅微镜的方法，以评估该微镜的机械稳定性。谐振频率。预处理CNT在其表面上具有正电荷，然后将其添加到Ni电镀液中以形成CNTs-Ni纳米复合电镀液。电镀的纳米复合材料中的CNT的重量分数为2.4重量％，超微压痕硬度为18.6GPa。与镍膜相比，在纳米复合材料中发现了机械强化现象。而且，与纯Ni相比，在纳米复合梁中添加CNT有效地增加了剪切模量。在长期稳定性测试期间，微镜的共振频率的最大变化约为0.25％，其扫描角度约为20度。通过适当的设计，它显示了CNTs-Ni纳米复合材料在微机械元件应用中的潜在适用性。

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