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Influence of electrode types on the electrohydrodynamic instability patterning process: a comparative study

机译：电极类型对电流体动力学不稳定性构图过程的影响：对比研究

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This article studies the effect that different types of patterned electrodes have on the electrohydrodynamic instability patterning (EHDIP) process for the faithful replication of micro-and nanostructures. Two types of patterned electrodes are studied. One is fully conductive, i.e. both pattern and substrate are conductive. The other type has conductive microstructures fabricated on a dielectric substrate. By employing the COMSOL (TM) Multiphysics software package, a rigorous numerical simulation of the EHDIP process has been carried out for both types of electrodes. The simulation results show that both electrodes can realize a faithful replication of the micro-and nanostructures once the variable, Delta E/Delta x, reaches the critical value. Moreover, it is demonstrated that a fully conductive template is preferred if a small polymer film thickness is employed; a partially conductive electrode is preferred for larger film thickness. These results provide guidelines for the better control of the EHDIP process in order to realize the perfect pattern replication of structures for a variety of applications in MEMS or microanofluidics.
机译：本文研究了不同类型的图案化电极对电动力学不稳定性图案化（EHDIP）过程的影响，以忠实地复制微结构和纳米结构。研究了两种类型的图案化电极。一种是完全导电的，即图案和衬底都导电。另一种类型具有在介电衬底上制造的导电微结构。通过使用COMSOL（TM）Multiphysics软件包，对两种类型的电极都进行了EHDIP工艺的严格数值模拟。仿真结果表明，一旦变量Delta E / Delta x达到临界值，两个电极都可以忠实地复制微结构和纳米结构。此外，已经证明，如果采用小的聚合物膜厚度，则优选全导电模板。对于较大的膜厚度，优选部分导电的电极。这些结果为更好地控制EHDIP工艺提供了指导，以实现针对MEMS或微/纳流体技术中各种应用的结构的完美图案复制。

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