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Absolute calibration of Hartmann-Shack wavefront sensor by spherical wavefronts

机译:用球面波前绝对校准Hartmann-Shack波前传感器

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摘要

A method for absolute calibration of Hartmann-Shack wavefront sensor (HSWFS), in which the wavefront differences of several spherical wavefronts are used to determine parameters of HSWFS, is proposed in this paper. The calibration method is introduced and the experiment results and error analysis are presented. Across a pupil with diameter of 2.6 mm, a lenslet array of 20 X 20 sub-apertures with square configuration, and focal length 4 mm, is used to sample the incident wave. The results indicate the uncertainty of the Hartmann-Shack wavefront sensor calibrated by the proposed method, is improved to less than lambda/60 PV value and lambda/500 RMS value (lambda velence 635 nm) with modal reconstruction method. Furthermore, the factors affected the results are analyzed. The error analysis suggested that the influences of the factors on the accuracy of reconstruction can be controlled to an accept level.
机译:提出了一种Hartmann-Shack波前传感器(HSWFS)的绝对标定方法,该方法利用多个球面波前的波前差确定HSWFS的参数。介绍了校准方法,并给出了实验结果和误差分析。在直径为2.6 mm的瞳孔上,使用20 X 20个子孔径的小透镜阵列(正方形配置,焦距为4 mm)对入射波进行采样。结果表明,采用模态重构方法,通过所提出的方法校准的Hartmann-Shack波前传感器的不确定度提高到小于λ/ 60 PV值和λ/ 500 RMS值(λvelence 635 nm)。此外,分析了影响结果的因素。误差分析表明,这些因素对重建精度的影响可以控制在可接受的水平。

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