An efficient coupler between a dielectric waveguide and a plasmonic metal-insulator-metal (MIM) waveguide is proposed, modeled, fabricated, and characterized. Based on the platform of a silicon slot waveguide, a quasi-MIM plasmonic junction is formed via e-beam lithography and lift-off process. Coupling efficiency between the silicon slot waveguide and plasmonic waveguide up to 43percent is obtained after normalizing to reference waveguides at 1550 nm. This coupling scheme can be potentially used for fast optical switching and small-footprint optical modulation.
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