Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser

Fei He; Ya Cheng; Zhizhan Xu; Yang Liao; Jian Xu; Haiyi Sun; Chen Wang; Zenghui Zhou; Koji Sugioka; Katsumi Midorikawa; Yonghao Xu; Xianfeng Chen

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Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser

机译：飞秒激光直接制造嵌在熔融石英中的均匀微流体通道

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We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

机译：我们演示了飞秒激光直接写入，然后通过湿法化学蚀刻和玻璃拉伸，直接制造嵌入在熔融石英中的均匀微流体通道。另外，玻璃拉制工艺显着降低了所制造通道的内表面粗糙度，并且可以实现纵横比大于1000的厘米级微流体通道。

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《Optics Letters》 |2010年第3期|共3页
作者
Fei He; Ya Cheng; Zhizhan Xu; Yang Liao; Jian Xu; Haiyi Sun; Chen Wang; Zenghui Zhou; Koji Sugioka; Katsumi Midorikawa; Yonghao Xu; Xianfeng Chen;
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1. Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser [J] . ◦Fei He Ya Cheng Zhizhan Xu Yang Liao Jian Xu Haiyi Sun Chen Wang Zenghui Zhou Koji Sugioka Katsumi Midorikawa Yonghao Xu and Xianfeng Chen Optics Letters . 2010,第3期

机译：飞秒激光直接制造嵌在熔融石英中的均匀微流体通道
2. Femtosecond laser assisted fabrication of networked semi-occlusive microfluidic channel on fused silica glass surface [J] . Li Guang, Feng Guoying, Wang Shutong, Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2017,第期

机译：Femtosecond激光辅助在熔融石英玻璃表面上的网络半闭塞微流体通道的制造
3. Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica [J] . C. Hnatovsky, R. S. Taylor, E. Simova, Optics Letters . 2005,第14期

机译：飞秒激光辅助熔融石英微流道制造中的极化选择性蚀刻
4. Centimeter-long microfluidic channel with an aspect ratio above 1,000 directly fabricated in fused silica by femtosecond laser micromachining [C] . Fei He, rnYa Cheng, rnZhizhan Xu, Laser applications in microelectronic and optoelectronic manufacturing XV . 2010

机译：飞秒激光微加工直接在熔融石英中制造长宽比大于1,000的厘米长微流体通道
5. Fabrication and Characterization of Linear and Nonlinear Photonic Devices in Fused Silica by Femtosecond Laser Writing [D] . Ng, Jason Clement. 2017

机译：飞秒激光写入法制备熔融石英中线性和非线性光子器件及其表征
6. Towards a versatile point-of-care system combining femtosecond laser generated microfluidic channels and direct laser written microneedle arrays [O] . Anika Trautmann, Gian-Luca Roth, Benedikt Nujiqi, 2019

机译：迈向结合飞秒激光产生的微流体通道和直接激光写入的微针阵列的多功能即时医疗系统
7. Femtosecond laser fabrication of birefringent directional couplers as polarization beam splitters in fused silica [O] . Luís A. Fernandes, Jason R. Grenier, Peter R. Herman, 2011

机译：飞秒激光制造双折射定向耦合器作为熔融二氧化硅中的偏振束分离器
8. Waveguide Fabrication in Fused Silica using Tightly Focused Femtosecond Laser Pulses [R] . Chan, J. W., Huser, T. R., Risbud, S. H., 2002

机译：使用紧密聚焦的飞秒激光脉冲在熔融石英中制造波导

Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser

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